University of Minnesota (via Coursera)
MEMS devices leverage the same equipment and processes used for semiconductor devices to create microscale sensors and actuators that drive innovation across a wide range of technologies in modern society. Through this course, learners will be able to demonstrate how these processes are specifically used for MEMS fabrication and highlight some differences from semiconductor fabrication. Key applications in consumer, industrial, aerospace, and medical applications are highlighted and described in more detail.
This course is part of the Semiconductor and MEMS Fabrication Specialization. It is recommended that learners take the previous courses of the Specialization prior to this course.
Please disregard module numbers because the content has been reorganized to improve comprehension and flow of the specialization.
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Free to audit, certificate paid